Friedrich-Schiller-Universitat Jena;
Institute of Applied Physics;
Abbe Center of Photonics;
Albert-Einstein-Straße 15;
07745 Jena;
Germany;
Helmholtz-Institute Jena;
Frobelstieg 3;
07743 Jena;
Germany;
Fraunhofer Institute for Applied Optics and Precision Engineering;
Albert-Einstein-Straße 7;
07745 Jena;
Germany;
coherent extreme ultraviolet sources; high average power; high harmonic generation; nonlinear compression; ultrafast laser;