Ultrafast laser processing of materials: from science to industry

Mangirdas Malinauskas; Albertas Žukauskas; Satoshi Hasegawa; Yoshio Hayasaki; Vygantas Mizeikis; Ričardas Buividas; Saulius Juodkazis

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Ultrafast laser processing of materials: from science to industry

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Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific,technological and industrial potential.In ultrafast laser manufacturing,optical energy of tightly focused femtosecond or picosecond laser pulses can be delivered to precisely defined positions in the bulk of materials via two-/multi-photon excitation on a timescale much faster than thermal energy exchange between photoexcited electrons and lattice ions.Control of photoionization and thermal processes with the highest precision,inducing local photomodification in sub-100-nm-sized regions has been achieved.State-of-the-art ultrashort laser processing techniques exploit high 0.1–1μm spatial resolution and almost unrestricted three-dimensional structuring capability.Adjustable pulse duration,spatiotemporal chirp,phase front tilt and polarization allow control of photomodification via uniquely wide parameter space.Mature opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters-per-second,leading to a fast lab-to-fab transfer.The key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication throughput.Emerging biomedical applications implementing micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications are highlighted.

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《光：科学与应用（英文版）》 |2016年第1期|548-561|共14页
作者
Mangirdas Malinauskas; Albertas Žukauskas; Satoshi Hasegawa; Yoshio Hayasaki; Vygantas Mizeikis; Ričardas Buividas; Saulius Juodkazis;
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作者单位

Laser Research Centre;

Department of Quantum Electronics;

Physics Faculty;

Vilnius University;

Saulėtekio Ave.10;

LT-10223 Vilnius;

Lithuania;

Center for Optical Research and Education(CORE);

Utsunomiya University;

7-1-2 Yoto;

Utsunomiya 321-8585;

Japan;

Research Institute of Electronics;

Shizuoka University;

3-5-3-1 Johoku;

Naka-ku;

Hamamatsu 432-8561;

Japan;

Centre for Micro-Photonics;

Faculty of Science;

Engineering and Technology;

Swinburne University of Technology;

Hawthorn;

VIC 3122;

Australia;

Melbourne Centre for Nanofabrication;

ANFF;

151 Wellington Road;

Clayton;

VIC 3168;

Australia;

Center of Nanotechnology;

King Abdulaziz University;

Jeddah 21589;

Saudi Arabia;

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原文格式 PDF
正文语种 chi
中图分类光电子技术、激光技术;
关键词
biomedical applications; direct laser writing; functional microdevices; material processing; nonlinear light–matter interaction; 3D structuring; ultrashort laser pulses;

Ultrafast laser processing of materials: from science to industry

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