与单级真空发生器相比，多级真空发生器具有抽气能力较强的优势，然而目前工业生产中真空发生器的选型比较盲目，为了定量地描述多级真空发生器的抽气特性，对真空发生器的选型提供一定参考。首先对三级真空发生器的静态流量进行了研究，给出多级真空发生器的真空输出端压力与流量的数学关系式；其次，结合容腔在无流阻和有流阻两种情况下，密闭容腔放气的数学模型，最终得出三级真空发生器在无流阻和有流阻两种情况下，真空度随时间的变化规律。%Compared with the single stage vacuum generator,Multistage vacuum generator has the advantage of strong pumping ca￣pacity. However, the blind selection of the vacuum generator exists in the industrial production. In this paper, the static flow of a three-grade vacuum generator is researched on and a mathematical relationship of the output press and the flow is derived to dem￣onstrate the flow characteristics of multiple-grade vacuum generator. The mathematical models of chambers in the situations with and without flow resistance and the vacuum degree of the three-grade vacuum varying with time under the both situations are ac￣quired.
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