针对微惯性器件中平面S型等线宽弹簧的弹性系数理论计算公式尚未完善,利用力学能量法,推导出了弹性系数理论公式。在平面S型等线宽弹簧基础上,提出了S型渐变线宽弹簧并推导出了弹性系数理论计算公式。利用ANSYS仿真软件验证公式的正确性。分析得到在集中力作用下,弹性系数相对误差小于3%；在惯性力作用下,其平均相对误差小于5%。分析表明,S型渐变线宽弹簧具有变形量与应力分布均匀、抗高过载的特性。研究结果为微惯性器件的优化设计提供了一定的理论参考。%Planar spring adopted in micro inertial devices is usual y in the form of S-shaped and equal line-width. When the planar spring works under inertial loads, its elastic coefficient is not easily calculated theoretical y. It is deduced based on mechanical energy method in this paper. And further, this paper designs the S-shaped gradient line-width spring and deduces the theoretical formula of the elastic coefficient. The simulation is done and the applicability of the formula is verified by using ANSYS software. The analysis demonstrates the relative error of the elastic coefficient formula is less than 3%under a concentrated force, and the average relative error is less than 5% under an inertial force. The S-shaped gradient line-width spring has abilities of the uniform deformation and stress distribution, anti-high overload. The study results provide a certain theoretical reference for the optimal design of micro inertial devices.
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