针对大平面度测量,设计一种新的平面度测量系统,该系统摒弃了高精度大平面度测量所需要的高精度导轨、高精度光学平面等,而是以液面作为一个平面基准,用干涉仪标定出测量系统的系统误差,然后用接触式传感器测量被测件,再进行误差分离,将系统误差从测量误差中分离出去,从而达到对大平面度的高精度测量.%A new flatness measuring system for large plane was designed. In the system, high precision guideway and optical plane were abandoned, which were reference surface in high precision flatness measurement for large planes. Using a liquid surface as a benchmark, an interferometer was used to calibrate the system error, then a contact sensor was used to measure the analyte, and then error separation was done to remove system error from the measurement error. So a high accurate measurement is achieved.
展开▼
