针对几种常见的非接触式测量方法的不足,提出基于锥光全息原理的非接触式测量方法,并设计系统结构,搭建实验平台来验证系统重复性等特性指标,实验结果证明系统重复性强.对测量系统的误差来源进行分析,并按照不确定度的合成原则,对系统的标准不确定度和扩展不确定度进行合成,得到系统的扩展不确定度为2.0μm.%To eliminate the shortage of some common non-contact measurement methods, non-contact measurement based on conoscopic holography was proposed, and configuration of the system was designed. Experimental platform was built to validate characteristic indexes such as repeatability. The experimental result shows that repeatability of the system is very strong. Error sources were analyzed. According to the principle of uncertainty synthesis, the standard uncertainty and expanded uncertainty were synthesized. The final uncertainty of the system is 2. 0 μm.
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