3D profile scanner is widely used in micro-inclusive 3D surface topography measurements. Based on white light confocal measure technique,design and working principle of the 3D profile scanneris described in itr. The scanner consists of high precision scanning stage,measurement system,optical assistant systems and control systems.An experimental prototype of the scanner was implemented,which vertical measure range is (20～400)μm with resolution of l 0nm,horizontal measuring range is (100xl00) mm with resolution of less than lμm.The experiments show that the scanner can achieve 2D profile and 3D surface topography measured with high accuracy,non-contact,high speed and wide measuring range ,etc.,which is practical for high precision non-contact 3D surface topography measuring.%三维轮廓扫描仪是广泛应用于微纳表面三维形貌测量的高精度设备.基于白光共焦测量技术,提出了非接触式三维轮廓扫描仪设计方案和工作原理.扫描仪由精密扫描工作台、测量系统、光学辅助系统及控制系统组成.试制的扫描仪样机垂直测量范围为(20～400)μm,分辨率10nm,水平测量范围(100x100)mm,分辨率小于1μm.实验表明,该扫描仪可实现二维轮廓曲线和三维形貌测量,具有精度高、非接触、测量快速和测量范围宽等特点,对于实现高精度非接触式三维轮廓测量具有较高的实用价值.
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