The design of MEMS transducers characterized by microminiaturization and multi domain coupling and the like requires high accuracy ,high efficiency ,iterative design ,and co design of structure and IC .Although the MEMS system level design method based on component library or lumped parame‐ters meets these requirements ,it is insufficient for customization design of specific MEMS device .Taking a resonant pressure sensor as an example ,a fully parameterized system level design method is put forward . Based on the detailed mathematical model ,the resonator of the sensor is modeled and simulated with a hardware description language .The simulation process and results show that it is a promising method that fulfills MEMS design .%具有微型化、多域耦合等特点的M EM S传感器对设计具有高精度、高效率、迭代设计、结构与电路联合设计等要求。基于组件库或集总参数的M EM S系统级设计方法虽然满足了这些要求，但在面向特定器件的定制化设计方面却略显不足。以一M EM S谐振式压力传感器为例，提出了一种全参数化系统级建模与仿真方法。在建立的详细数学模型基础上，通过硬件描述语言对传感器谐振子按照详细拓扑结构进行了建模与仿真。仿真结果和实验结果的对比显示这是一种满足M EM S设计要求的建模与仿真方法。
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