A Flexible Pressure Sensor Based on Poly(dimethylsiloxane) Nanostructures Film

著录项

• 来源
  《微电子制造学报》 |2019年第3期|P.7-12|共6页
• 作者

  Man Zhang; Liangping Xia; Suihu Dang; Lifang Shi; Axiu Cao; Chunlei Du;

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• 作者单位

  [1]School of Electronic Information Engineering Yangtze Normal University Chongqing China 408100;

  [2]Institute of Optics and Electronics Chinese Academy of Sciences Chengdu China 610209;

  [3]Chongqing Key Laboratory of Multi-Scale Manufacturing Technology Chongqing Institute of Green and Intelligent Technology Chinese Academy of Sciences Chongqing China 400714;

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• 原文格式 PDF
• 正文语种 chi
• 中图分类 无线电电子学、电信技术;
• 关键词

  Flexible; pressure sensor; poly(dimethylsiloxane); soft nanoimprint lithography; triboelectrostatic charges;