Shanghai Integrated Circuits R&D Center Co. Ltd. Shanghai China 2012032;
Shanghai Integrated Circuits R&D Center Co. Ltd. Shanghai China 2012032;
Shanghai Integrated Circuits R&D Center Co. Ltd. Shanghai China 2012032;
Shanghai Integrated Circuits R&D Center Co. Ltd. Shanghai China 2012032;
Shanghai Integrated Circuits R&D Center Co. Ltd. Shanghai China 2012032;
Shanghai Integrated Circuits R&D Center Co. Ltd. Shanghai China 2012032;
Shanghai Integrated Circuits R&D Center Co. Ltd. Shanghai China 2012032;
Shanghai Huali Microelectronics Corporation Shanghai China 2013173;
Shanghai Huali Microelectronics Corporation Shanghai China 2013173;
State Key Lab of ASIC&System School of Microelectronics Fudan University Shanghai China 201203;
SEM images; contour extraction; machine leaning(ML); deep convolution neural network(DCNN); edge placement variation;