It has been revealed that structures and properties of SiNx films are closely related to composition of SiNx. On the other hand, visible photoluminescence (PL) has been observed in SiNx films fabricated under different conditions, and different explanations on their photoluminescence mechanism has been given. The development on the photoluminescence of SiNx films in recent 10 years is summarized and the corresponding PL mechanisms are reviewed.%SiNx的结构和性能都会随x值发生显著变化,尤其是薄膜的发光性质.同时,在不同条件下制备的SiNx薄膜中都观察到了可见光致发光现象,研究者提出了相应的机制予以解释.总结了近十年来关于SiNx薄膜的光致发光研究进展,评述了其各种发光机制.
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