The preparation methods of porous TiO2 thin films,such as liquid phase ways (Including sol-gel, evaporation-induced self-assembly,etc. ), physical vapor deposition waysdncluding magnetron sputtering, electron beam evaporation deposition,etc. .), electrochemical ways (Including anodic oxidation, micro-arc oxidation,etc. ) are summarized, and the preparing theory is introduced respectively. Different ways of preparing porous TiO2 thin films have great difference in surface topography, aperture size, tropism and wall of hole thickness aspect. The problems in synthesizing porous TiO2 thin films and research direction in the future are pointed out at last.%综述了液相法(包括溶胶凝胶法、蒸发诱导自组装法等)、电化学法(包括阳极氧化法、微弧氧化法等)、物理气相法(包括磁控溅射法、电子束蒸发法等)、化学气相法等制备多孔TiO2薄膜的方法,介绍了相应的合成原理,指出不同方法制备的多孔TiO2薄膜在表面形貌、孔径尺寸、取向和孔壁厚度等方面存在很大差异.通过对比不同制备方法的优缺点并结合工业化生产成本,提出了今后多孔TiO2薄膜制备技术的发展方向,并展望了多孔TiO2薄膜广阔的应用前景.
展开▼
