Al-Ti-N and Al-Ti-Si-N coatings with similar atom ratio were deposited on the surfaces of Al2O3, low alloy steel and cemented carbide cutters by cathodic arc evaporation technology. Effect of Si on the structure, mechanical properties and oxidation resistance of Al-Ti-N coatings was studied by XRD, SEM, nano indentation, scratch and oxidation tests. The results show that Al-Ti-N coatings are mainly cubic structure and hexagonal structure. Si doping decreases the solution of Al in TiN. and the Al-Ti-Si-N coatings turn to be mainly hexagonal structure and cubic structure. The hardness of Al-Ti-N coating is 34.5 GPa, and that of Al-Ti-Si-N is 28.7 GPa, which is the results of Si doping. The stress of coating increases with the addition of Si, resulting in the decrease of interfacial strength between matrix and coating. The oxidation resistance of Al-Ti-N coating is improved significantly with the doping of Si, and the antioxidant temperature is over 1 000℃.% 采用阴极弧蒸发技术在 Al2O3、低合金钢和硬质合金刀片上沉积 Ti 与 Al 原子比相近的 Al-Ti-N 和Al-Ti-Si-N 涂层，借助 X 射线衍射(XRD)、扫描电镜(SEM)、纳米压痕、划痕实验和氧化实验，研究 Si 掺杂对Al-Ti-N涂层的结构、力学性能和抗氧化性能的影响。结果表明：Al-Ti-N涂层为以立方为主的立方和六方的两相结构，Si掺杂可降低TiN中Al的固溶度，使涂层转化为以六方为主的六方和立方的两相结构；Si的加入导致涂层硬度由34.5 GPa 降到28.7 GPa；Si掺杂引起涂层的应力增加，从而导致涂层与基体的结合强度降低；Al-Ti-N涂层的抗氧化性能随Si的加入而显著改善，抗氧化温度提高到1000℃以上。
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