The eddy current displacement sensor has different temperature sensitivity coefficients for different displacement measurements.The single curve fitting method can't realize the temperature compensation in measuring range.The temperature drift data of the coil voltage at multiple specified displacements was collected in temperature box,and fitted for curves. According to the curves and temperature of the coil inside the sensor,the coil voltage of the specified displacement can be obtained. The least square method is used to fit the specified displacement and coil voltage to obtain a polynomial equation. The coil voltage is substituted into the equation to obtain a displacement independent of temperature,and realize the temperature compensation. The sensor has high dynamic response by using the method combining DMA interrupt and background program.%电涡流位移传感器在测量不同位移时有不同的温度灵敏度系数.单一的曲线拟合方法无法实现全量程的温度补偿.在温箱中收集多个指定位移处线圈电压的温飘数据,并拟合成曲线,根据这些曲线和传感器内线圈的温度可得到指定位移处线圈电压.用最小二乘法拟合指定位移和线圈电压得到一个多项式方程.把线圈电压值代入该方程可得到与温度无关的位移量,实现温度补偿.采用DMA中断和后台程序相结合的方法,使得传感器具有高动态响应.
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