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微流体系统中微通道网络成形工艺研究进展

         

摘要

As the key part of microfluidic system ,micro-channel is a key factor to improve the micro-flow property .Existing micro-channel forming material include silicon ,quartz,glass and other inorganic materials and some organic materials ,such as PDMS, PMMA,PC and epoxy resin,the process including the wet/dry etching,hot forming,micro/nano lithography,laser micro-machi-ning,molding,etc.According to the functional requirements of different application areas and spatial arrangement of the micro -channel,the micro-channel network can be divided into three types ,as linear,planar and three-dimensional,summarizes the re-search status of different types of micro-channel network forming process ,where linear and planar micro-channel network is gener-ally produced simultaneously with the forming ,the process is relatively mature ,but the three-dimensional micro-channel networks need to realize step by step ,more difficult.Explore the existing micro-channel network forming process shortcomings and trends . Briefly introduces the glass bionic micro-channel and research progress on the forming process of the network .%微通道作为微流体系统的重要组成部分,是提高微流动性能的关键因素。现有微通道制作材料包括硅、石英和玻璃等无机材料,以及PDMS、PMMA、PC和环氧树脂等有机材料,而加工工艺主要有湿/干法刻蚀、热压成型、微/纳光刻技术、激光微加工和模塑法等类型。根据不同应用领域中微通道的功能需求和空间布置情况,可将微通道网络分为线性、平面和立体三种类型,综述了不同类型微通道网络成形工艺的国内外研究现状,其中线性和平面微通道网络的制作与成形一般是同时完成的,工艺较成熟,而立体微通道网络需分步实现,难度较大。探讨了现有微通道网络成形工艺的不足和发展趋势。简要介绍了玻璃基仿生微通道及其网络成形工艺研究进展。

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