X-ray fluorescence spectrometer is a powerful tool for composition and structure analysis .The basic principle of X-ray fluorescence spectrometer is briefly described and carried on the classification , focused on the advances about light source , detector, etc.in the field of hardware , sketched the applications , and finally made a brief outlook about the trend .%X射线荧光光谱仪是进行组分和结构分析的有力工具，简述了X射线荧光光谱仪的基本原理并对其进行了分类，重点介绍了其在光源、探测器等硬件发面的发展，扼要介绍了其应用，最后对其发展趋势作了简要展望。
展开▼
