Analysis of hydrogen depth profile by the proton elastic scattering with coincidence method was simu-lated by Monte Carlo method.The factors affecting the depth resolution of hydrogen were studied.According to the results, the depth resolutions of about 0.2 m for 1~3 m thickness aluminum foils with hydrogen contamina-tion on the surface can be achieved by 1.5 MeV proton beam.Meanwhile, the aluminum foils with inner hydro-gen layer were simulated.The results indicated that the method could also be used to analyze the hydrogen dis-tribution inside the sample.%本文从离子与物质相互作用的基本原理出发，用蒙特卡罗方法模拟了用质子弹性散射符合分析方法分析表面含氢的几组不同厚度的金属薄膜样品的实验，详细介绍了模拟过程中影响深度分辨率的多种因素，如束流能量、能损歧离、角度歧离等。本文基于2×1．7MV串列静电加速器可以提供的质子束能量范围，通过模拟计算得到用能量为1．5 MeV的质子束分析厚度为1～3微米的铝膜，深度分辨可以达到0．2微米。本文还给出了内部含氢的多层铝膜的模拟结果，表明此方法可以很好地分析薄膜内部氢元素的深度分布。
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