空间分辨率和聚焦效率是X射线微纳探针最关键的技术指标.压弯非球面镜具备聚焦效率高、空间分辨好、加工难度低、色散消除等优点.基于上海光源硬X射线微聚焦及应用线站的现有条件,在精确压弯理论的基础上设计了高精度柔性铰链压弯机构并进行了有限元分析,并且进一步对压弯镜体宽度进行了优化.通过长程面形仪(Long Trace Profiler,LTP)对压弯机构的测试,得到压弯非球面镜的斜率误差为430nrad,理论上可实现230 nm的硬X射线聚焦光斑.%Background:The spatial resolution and focusing efficiency are the key parameters for X-ray micro- and nano-probe. Aspherical bent mirror is of great advantages such as high spatial resolution, high focusing efficiency, easy machining and achromatic. Purpose:This study aims to design a sub-micron focused bending mechanism. Methods:A high-precision flexure bending mechanism is designed for hard X-ray micro-focusing beamline (BL15U1) at Shanghai synchrotron radiation facility (SSRF) on the basis of exact bending theory. The simulation of finite element analysis (FEA) and width optimization are completed. Finally proposed bending mechanism was tested by long trace profiler (LTP). Results:The testing results show that the achieved slope error is 430 nrad.Conclusion:This high-stability flexure bending mechanism can produce a theoretical spatial resolution at 230 nm.
展开▼
