2.45GHz were briefly described. The experiments showed that bothrn plasma ion density and electron temperature in the charge chamber dependernd on the magnetic field, microwave power and gas pressure. It was found thrnat the microwave breakdown occurred easily at the static magnetic field ofrn 87.5mT. However, the highest plasma density was obtained at about 93mT. Trnhe microwave introducing window consisted of three dielectric plates of qurnartz, aluminum and BN, which allow better impedance matching with the plasrnma. The source can operate at gas pressure of 0.11Pa. The power reflection coefficient is about 1%. Plasma ion density of 5.81011cm-3 and electron temperature of 312eV have been obtained at the microwave power of 200700W. The lifetime of the source is more than 300h.%简要描述了一台频率为2.45GHz的电子回旋共振(ECR)等离子体源的特性测试，结果表明，放电室内的等离子体密度和电子温度与静态磁场、微波输入功率和真空度等参数均有着密切关系rn。当磁场达到共振条件87.5mT时，等离子体很易产生，但等离子体密度的最大值却出现在93mT处。ECR源在真空度为0.11Pa间均能运行。由石英、Al2O3陶瓷和BN构成的rn微波输入窗有良好的阻抗匹配，在微波功率为200700W间，反射系数仅为1%，等离子体密度达5.8×1011cm-3，电子温度为312eV，该源的寿命超过300h。
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