设计和试制了一种基于石英材料的开放式光波导环形谐振器，器件设计采用数值仿真计算结合 BPM 仿真的手段。结合商用石英波导的常规参数，设计取环行波导的传输损耗和定向耦合器的耦合损耗分别为0．1 dB／cm 和0．1 dB，谐振谱共振锐度的设计值为16．7。器件制备采用 PECVD 技术结合 FHD 技术的工艺，样品测试采用了0．1 nm 带宽的 DFB 激光，观察到了明显的谐振谱。%A kind of open-mode optical waveguide ring resonator that based on quartz materials is designed and manufactured.The design is by means of numerical simulation combined with BPM simulation.Transmission loss of circular waveguide is 0.1 dB/cm and directional coupler coupling loss is 0.1 dB.The sharpness of the resonance spectrum is 16.7.The PECVD technology was used with FHD technique to manufacture the optical waveguide ring resonator. DFB laser of 0.1 nm bandwidth was used to test sample and the resonance spectrum could be observed easily.
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