设计并制备了一种在45°斜入射条件下使用的金属Ag消偏振反射镜,这种反射镜可以实现对目标波长810 nm和850 nm光线的反射,并保持线偏光的偏振方向和偏振消光比.为了消除s和p两偏振分量的分离,在金属Ag膜层上方添加了介质多层膜结构,并利用软件对膜系的结构进行了优化,设计结果的能量和相位特性满足目标需求.介质多层膜选用TiO2和SiO2分别作为高、低折射率材料,薄膜的制备采用了离子束辅助沉积工艺,并利用石英晶体振荡监控膜层厚度.得到了消光比达到10000∶1以上的样品,实现了光学薄膜器件对能量和相位的控制,满足了偏振编码空间光通信试验的需求.%For reflecting target lights of 810 nm and 850 nm wavelengths,while keeping the polarization directions and pursuing the maximal extinction ratio,a depolarization Ag mirror at incidence angle of 45° is designed and fabricated.Additional multilayers have been deposited above the Ag layer to control the separation of s-and p-polarization components.The film configuration is optimized by software Filmwizard,and the phase and energy parameters meet the design target.TiO2 and SiO2 have been chosen as high-and low-refractive index layer materials respectively.Ion beam-assisted deposition is used to improve packing density of the layers,and quartz crystal oscillator is used to control the thickness of films.The extinction ratio of obtained sample reaches 10000∶ 1.Phase and energy control of optical thin films was realized to meet the demands of polarization coding optical communication experiment.
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