从基于DDSOG(Deep Dry Silicon on Glass)工艺的硅微谐振式加速度计样机入手,阐述了加速度计中微杠杆结构对惯性力的放大作用,证明了标度因数与系统放大倍数n为正比关系,并以加速度计样机中的单级微杠杆为例,建立了加速度计的理论模型.推导了微杠杆的放大倍数A和轴向刚度K的计算公式,以此为基础导出了加速度计系统放大倍数n的计算方法.依据公式计算得到加速度计样机的系统放大倍数n的理论值为21.820,并用有限元方法对理论值进行了仿真验算,得出n的仿真值为19.最后对加速度样机进行了实际测试,测得加速度计的标度因数为127.33 Hz/g,系统放大倍数n为25.466.对所得结果的比较表明,系统放大倍数的理论值与仿真值及实验值的误差分别为14.8%和14.3%,误差在可接受范围内.%A micromechanical Silicon Resonant Accelerometer (SRA) prototype fabricated by Deep Dry Silicon on Glass (DDSOG) process was presented. The amplification of single-stage microlever in the SRA to the interial force was researched, then it pointed out that the scale factor of SRA is proportional to the system amplification factor n. The theoretical model of single-stage microlever in SRA was established, and the formulas for microlever amplification factor A and axial stiffness K were derived.On this base, the formula for system amplification factor n was also derived. According to the formula, the theoretical value of system amplification factor n for SRA prototype is calculated to be 21. 820.As a comparison,its simulation value of 19 is also achieved by the Finite Element Analysis (FEA).The practical test for the SRA prototype was performed,which shows that the scale factor of the SRA is 143 Hz/g and the system amplification factor is 25. 466. As compared with the theoretical value,the errors of simulation and test results are 14.8％ and 14.3％ ,respectively, which are within the acceptable range.
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