提出一种用光纤实现点衍射干涉的方法,由两根光纤分别传输参考光和测试光,利用单模光纤的小纤芯所产生的高质量衍射球面波进行超精面形的测量。与传统的干涉仪相比,该方法结构相对简单,误差来源少,且不需要传统干涉仪中的高质量标准面,而是由光纤提供高精度的参考波面。%A method implementing point-diffraction interferometry based on fiber is proposed. Two fibers transmit reference wave and testing wave, respectively, the high quality diffractive spherical wavefront created by single mode fiber can be used for measuring super-precision surface. Compared with conventional interferometers,the configuration is easier and less error.Instead of the traditional standard surface, the fiber will provide high quality reference wavefront.
展开▼