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《等离子体科学和技术：英文版》
>Characteristics of C_2 Radical in CHF_3 and CF_4 Electron Cyclotron Resonance Plasmas Studied by Optical Emission Spectroscopy
Characteristics of C_2 Radical in CHF_3 and CF_4 Electron Cyclotron Resonance Plasmas Studied by Optical Emission Spectroscopy
The characteristics of CHF3 and CF4 electron cyclotron resonance (ECR) plasma have been sudied by optical emission spectroscopy (OES) and Langmuir probe.It is found that C2 radical is one of mian compositions in both of the two plasmas .WE investigated the relative concentration of C2 radical as a function of F( H) radical and ion density ,The fromation mechanism of C2 radical is analyzed.
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