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Theoretical Study on the Characteristics of Atmospheric Radio Frequency Discharges by Altering Electrode Gap

         

摘要

In this paper,we present a theoretical study on the discharge characteristics of radio-frequency discharges at atmospheric pressure driven by a higher frequency of 40.68 MHz while the electrode gap is altered.Based on the analytical equations and simulation data from a one-dimensional fluid model,an optimal gap between electrodes,at which the largest electron density is obtained,can be observed under a constant power condition;however,as the electrode gap increases the time-averaged electron temperature decreases,and the underpinning physics is also discussed based on the simulation results.This study indicates that at a constant power by choosing an appropriate electrode spacing,the rf discharge can be effectively optimized at atmospheric pressure.

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