Effect of Hydrogen Dilution on Growth of Silicon Nanocrystals Embedded in Silicon Nitride Thin Film bv Plasma-Enhanced CVD

DING Wenge; ZHEN Lanfang; ZHANG Jiangyong; LI Yachao; YU Wei; FU Guangsheng

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Effect of Hydrogen Dilution on Growth of Silicon Nanocrystals Embedded in Silicon Nitride Thin Film bv Plasma-Enhanced CVD

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An investigation was conducted into the effect of hydrogen dilution on the mi-crostructure and optical properties of silicon nanograins embedded in silicon nitride (Si/SiNx) thin film deposited by the helicon wave plasma-enhanced chemical vapour deposition technique. With Ar-diluted SiH4 and N2 as the reactant gas sources in the fabrication of thin film, the film was formed at a high deposition rate. There was a high density of defect at the amorphous silicon (a-Si)/SiNx interface and a relative low optical gap in the film. An addition of hydrogen into the reactant gas reduced the film deposition rate sharply. The silicon nanograins in the SiNx matrix were in a crystalline state, and the density of defects at the silicon nanocrystals (nc-Si)/SiNx interface decreased significantly and the optical gap of the films widened. These results suggested that hydrogen activated by the plasma could not only eliminate in the defects between the interface of silicon nanograins and SiNx matrix, but also helped the nanograins transform from the amorphous into crystalline state. By changing the hydrogen dilution ratio in the reactant gas sources, a tunable band gap from 1.87 eV to 3.32 eV was obtained in the Si/SiNx film.

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《等离子体科学和技术（英文版）》 |2007年第5期|599-602|共4页
作者
DING Wenge; ZHEN Lanfang; ZHANG Jiangyong; LI Yachao; YU Wei; FU Guangsheng;
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作者单位

College of Physics Science and Technology, Hebei University, Baoding 071002, China;

College of Physics Science and Technology, Hebei University, Baoding 071002, China;

College of Physics Science and Technology, Hebei University, Baoding 071002, China;

College of Physics Science and Technology, Hebei University, Baoding 071002, China;

College of Physics Science and Technology, Hebei University, Baoding 071002, China;

College of Physics Science and Technology, Hebei University, Baoding 071002, China;

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原文格式 PDF
正文语种 chi
中图分类等离子体物理学;
关键词
hydrogen dilution, silicon nanocrystals, silicon nitride film;

机译：氢稀释;硅纳米晶体;氮化硅膜;

Effect of Hydrogen Dilution on Growth of Silicon Nanocrystals Embedded in Silicon Nitride Thin Film bv Plasma-Enhanced CVD

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