Continuous emission spectrum measurement is applied for the inconvenient diagnosticsof low-temperature collisional plasmas.According to the physical mechanism of continuousemission,a simplified model is presented to analyze the spectrum in low temperature plasma.Thevalidity of this model is discussed in a wide range of discharge parameters,including electron temperatureand ionization degree.Through the simplified model,the continuous emission spectrumin a coUisional argon internal inductively coupled plasma is experimentally measured to determinethe electron temperature distribution for different gas pressures and radio-frequency powers.Theinverse Abel transform is also applied for a better spatially resoluted results.Meanwhile,theresult of the continuous emission spectrum measurement is compared to that of the electrostaticdouble probes,which indicates the effectiveness of this method.
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