通过物理气相沉积方法，在挠性印制电路板微钻上沉积超硬SHC涂层，对涂层的硬度、结合强度等力学性能进行了研究，并进行了超硬SHC涂层微钻与未涂层微钻对比加工测试。实验结果表明，超硬SHC涂层的硬度高，与硬质合金基材结合良好，涂层的摩擦系数低；在本实验中，超硬SHC涂层钻头加工柔性PCB板材时，使用寿命是未涂层钻头的2倍。%Super hard SHC coating is deposited on micro-drills for printed circuit boards drilling by physical vapor deposition, the mechanical properties such as hardness and coating-substrate adhesion of super hard SHC coating are studied, and a comparative drilling test between super hard SHC coated drills and uncoated drills has been done. The results show that the hardness and elastic modulus of super hard SHC coating and the adhesion with substrate are very good. It was also found that the service life of super hard SHC coated drills was 2 times than uncoated ones when drillingfiexible printed circuit boards in this paper.
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