Aiming at the problems of small measuring range of the current gas flow standard facility and the lack of leakage detecting system of nozzle segment, a high accuracy gas flow standard facility with extended range ability and negative pressure based on sonic nozzle is researched and developed. Through adopting high accuracy critical flow Venture nozzles with low flow rate, increasing the accuracy of effect parameters like temperature and pressure, using unique gas-ring pump and multistage centrifugal blower vacuum equipment, and benefiting from leakage detecting technology and Profibus technology, etc, high performance of the device is achieved. Test results show that the standard device features wide measuring range, low extending uncertainty and large caliber of the tested instrumentation, etc, possessing broad application prospect.%针对目前气体流量标准装置测量范围度较小和喷嘴组无密封性检漏措施等问题,研制了一套基于音速喷嘴的宽量程度负压法高准确度气体流量标准装置.该装置通过选取高准确度小流量临界流文丘里喷嘴,提高影响参量(如温度、压力)的测量准确度.采用独特的气环泵及多级离心风机真空发生设备,同时借助检漏技术及Profibus现场总线技术等措施,实现了装置的高性能.验证结果表明,该标准装置测量范围度大、扩展不确定度低、被检仪表口径范围广,具有广阔的应用前景.
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