Electrostatic force actuation is widely applied to Micro Electromechnieal System (MEMS), but it needs high voltages. Here a high speed control system is described which based on the fix-point digital signal processor TMS320F2812. Control system using USB2.0 communicate with PC, the voltage that calculated by PC output via USB2.0 to embedded chip. Experiment results show that the data transmission speed achieves 20 Mbyte/s,and the frequency of digital to analog convertor could achieve 30 MH, and the control system can meet the requirement of the electrostatic force actuation.%静电力驱动在微机电系统中的应用十分广泛,但采用静电力驱动时所需控制电压较高.设计一种以定点数字信号处理器TMS320F2812为核心的传感器高压控制系统,采用USB2.0与PC机进行通讯,接收致动器所需控制电压,并控制D/A转换器输出,经过高压放大后施加到传感器上.测试表明USB传输速率可以达到20 Mbytes/s,D/A转换速率达到30 MHz,电压范围在(0-300) V之间,整个控制系统可以满足静电力控制传感器所需高压.
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