正Recently,there is an increasing requirement for controlling linear motion up to a few hundred of millimeter strokes in the area of the liquid crystal display(LCD) production equipment.The requirements of the motion system for LCD production equipment are high acceleration and high velocity with positioning accuracy.To satisfy these requirements,it has to be designed with the high-thrust force and low velocity ripple.In this work, high-thrust and double-sided linear synchronous motor (LSM)module is proposed and the developed high-thrust and double-sided LSM module is verified by performance test.
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