The structural, morphological, mechanical and tribological characterization of nanoscaled multilayer TiN/TaN coatings deposited by magnetron sputtering technology were investigated by low angle X-ray diffractometry, high angle X-ray diffractometry, atomic force microscopy, microhardness, pin-on-disc testing and 3-D surface profiler. The results show that the TiN/TaN coatings exhibit good modulation period and sharp interface between TiN and TaN layers. In mutilayered TiN/TaN coatings, TiN layers have cubic structure, but hexagonal structure emerged among TaN layers besides cubic structure as modulation period is beyond 8.5 nm. The microhardness is affected by modulation period and the maximum hardness value of 31.5 GPa appears at a modulation period of 8.5 nm. The coefficient of friction is high and the wear resistance is improved for TiN/TaN coatings compared with those of TiN coating; the wear mechanism exhibits predominantly ploughing, material transfer and localized spallation.
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