首页> 中文期刊> 《传感器与微系统》 >柔性高灵敏单壁碳纳米管气体传感器研究

柔性高灵敏单壁碳纳米管气体传感器研究

         

摘要

在柔性聚对二甲苯C基底上制作了基于单壁碳纳米管的小型化、高灵敏、反应快速的气体传感器.使用介质电泳集成碳管束,并利用单链脱氧核糖核酸修饰增强器件灵敏度.当传感器暴露在甲醇蒸气中时,会出现明显可重复的反应,它可以检测含量低至4.3×10-6的甲醇,并且在相当宽的体积分数范围有清晰的分辨能力.对于4.3×10-6的含量,未修饰的传感器对应电阻变化率是4 8%;经过脱氧核糖核酸修饰,电阻变化率增加到了12.3%.此外,该传感器还显示了很快的响应速度和很好的测试复验性.研究表明:这种柔性气体传感器在未来环境监测应用中有很好的前景.%Miniature, sensitive single-walled carbon nanotube (SWCNT)gas sensors with a fast response is fabricated and characterized on a flexible thin parylene-C substrate. Dielectrophoretic assembly is used to incorporate SWCNT bundles on to microelectrodes which formed the sensor structure. Single-stranded deoxyribonucleic acid ( DNA) is decorated on CNT bundles to enhance the sensitivity of the sensors. The measurements indicate an obvious and reproducible resistance change when the sensors are exposed to methanol vapors. The nanosensors are able to detect methanol volume fraction as low as 4. 3 × 10-6 and the corresponding change in resistance of bare SWCNT nanosensors is 4.8 % - After DNA decoration,the sensors show an enhanced response 12. 3 %. The sensors display a very fast response rate and excellent reproducibility. These results demonstrate the promise of using SWCNT based flexible gas sensors in emerging environmental monitoring applications.

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