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Electrical Properties of Thin-Film Capacitors Fabricated Using High Temperature Sputtered Modified Barium Titanate

机译：用高温溅射改性钛酸钡制造的薄膜电容器的电性能

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Simple thin-film capacitor stacks were fabricated from sputter-deposited doped barium titanate dielectric films with sputtered Pt and/or Ni electrodes and characterized electrically. Here, we report small signal, low frequency capacitance and parallel resistance data measured as a function of applied DC bias, polarization versus applied electric field strength and DC load/unload experiments. These capacitors exhibited significant leakage (in the range 8–210 μA/cm2) and dielectric loss. Measured breakdown strength for the sputtered doped barium titanate films was in the range 200 kV/cm −2 MV/cm. For all devices tested, we observed clear evidence for dielectric saturation at applied electric field strengths above 100 kV/cm: saturated polarization was in the range 8–15 μC/cm2. When cycled under DC conditions, the maximum energy density measured for any of the capacitors tested here was ~4.7 × 10−2 W-h/liter based on the volume of the dielectric material only. This corresponds to a specific energy of ~8 × 10−3 W-h/kg, again calculated on a dielectric-only basis. These results are compared to those reported by other authors and a simple theoretical treatment provided that quantifies the maximum energy that can be stored in these and similar devices as a function of dielectric strength and saturation polarization. Finally, a predictive model is developed to provide guidance on how to tailor the relative permittivities of high-k dielectrics in order to optimize their energy storage capacities.
机译：简单的薄膜电容器叠层由具有溅射的Pt和/或Ni电极的溅射沉积掺杂钛酸钡电介质薄膜制成，并具有电气特性。在这里，我们报告了根据施加的直流偏置，极化与施加的电场强度以及直流负载/卸载实验而测得的小信号，低频电容和并联电阻数据。这些电容器表现出明显的泄漏（在8–210μA/ cm 2 范围内）和介电损耗。溅射的掺杂钛酸钡薄膜的击穿强度为200kV / cm -2 MV / cm。对于所有测试的设备，我们都清楚地看到了施加的电场强度超过100 kV / cm时介电饱和的证据：饱和极化范围为8–15μC/ cm 2 。在直流条件下循环时，此处测试的任何电容器的最大能量密度仅为电介质材料的体积，约为〜4.7×10 -2 W-h / L。这对应于〜8×10 -3 W-h / kg的比能，再次基于纯电介质进行计算。将这些结果与其他作者所报告的结果进行了比较，并提供了一种简单的理论方法，该方法根据电介质强度和饱和极化来量化可以存储在这些和类似设备中的最大能量。最后，开发了一种预测模型，为如何调整高k电介质的相对介电常数以优化其储能能力提供了指导。

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