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Conduction Mechanisms in Resistance Switching Memory Devices Using Transparent Boron Doped Zinc Oxide Films

机译:使用透明掺硼氧化锌薄膜的电阻开关存储器件中的导电机理

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摘要

In this work, metal/oxide/metal capacitors were fabricated and investigated using transparent boron doped zinc oxide (ZnO:B) films for resistance switching memory applications. The optical band gap of ZnO:B films was determined to be about 3.26 eV and the average value of transmittance of ZnO:B films was about 91% in the visible light region. Experimental results indicated that the resistance switching in the W/ZnO:B/W structure is nonpolar. The resistance ratio of high resistance state (HRS) to low resistance state (LRS) is about of the order of 105 at room temperature. According to the temperature dependence of current-voltage characteristics, the conduction mechanism in ZnO:B films is dominated by hopping conduction and Ohmic conduction in HRS and LRS, respectively. Therefore, trap spacing (1.2 nm) and trap energy levels in ZnO:B films could be obtained.
机译:在这项工作中,制造了金属/氧化物/金属电容器,并使用透明掺硼氧化锌(ZnO:B)膜对电阻开关存储应用进行了研究。 ZnO:B膜的光学带隙被确定为约3.26eV,并且ZnO:B膜的透射率的平均值在可见光区域中为约91%。实验结果表明,W / ZnO:B / W结构中的电阻切换是非极性的。在室温下,高电阻状态(HRS)与低电阻状态(LRS)的电阻比约为10 5 。根据电流-电压特性的温度依赖性,ZnO:B薄膜的导电机理分别由HRS和LRS中的跳跃导电和欧姆导电决定。因此,可以获得ZnO:B薄膜中的陷阱间距(1.2 nm)和陷阱能级。

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