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Discrepancies in the Microstructures of Annealed Cu–Zr Bulk Alloy and Cu–Zr Alloy Films

机译:退火Cu-Zr块状合金和Cu-Zr合金膜的微观结构差异

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摘要

Copper–zirconium bulk alloy and Cu–Zr alloy films are prepared by vacuum smelting and magnetron sputtering, respectively, and subsequently annealing is conducted. Results show that Cu–Zr bulk alloy and alloy films exhibit significantly different microstructure evolution behaviors after annealing due to different microstructures and residual stress states. CuxZr alloy compounds disperse at the grain boundary of Cu grains in as-cast and annealed Cu–Zr bulk alloys. However, unlike bulk alloys, a large number of polyhedral Cu particles are formed on the Cu–Zr thin films’ surface upon thermal annealing. Kinetically, the residual compressive stress in the Cu–Zr films promotes the formation of Cu particles. The influencing factors and the path for mass transport in the formation of the particles are discussed. The large-specific surface area particles/film composite structure has potential applications in Surface-Enhanced Raman Scattering, catalysis, and other fields.
机译:分别通过真空熔炼和磁控溅射制备铜锆块状合金膜和CuZr合金膜,然后进行退火。结果表明,由于不同的微观结构和残余应力状态,退火后的Cu-Zr块状合金和合金膜表现出明显不同的微观组织演化行为。 CuxZr合金化合物分散在铸态和退火后的Cu-Zr块状合金中的Cu晶粒的晶界处。但是,与块状合金不同,通过热退火在Cu-Zr薄膜的表面上会形成大量的多面体Cu粒子。从动力学上说,Cu-Zr膜中的残余压应力会促进Cu颗粒的形成。讨论了颗粒形成过程中传质的影响因素和途径。大比表面积的颗粒/膜复合结构在表面增强拉曼散射,催化和其他领域中具有潜在的应用。

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