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The Effect of Displacement Constraints on the Failure of MEMS Tuning Fork Gyroscopes under Shock Impact

机译：位移约束对冲击冲击下MEMS音叉陀螺仪故障的影响

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摘要

Displacement constraints such as stops are widely used in engineering to improve the shock resistance of microelectromechanical system (MEMS) tuning fork gyroscopes. However, in practical applications, it has been found that unexpected breakage can occur on MEMS tuning fork gyroscopes with stops. In this paper, the effects of two displacement constraints on the failure mode of MEMS tuning fork gyroscopes are studied. The MEMS tuning fork gyroscope is simplified to a two-degree-of-freedom (2DOF) model, then finite element analysis (FEA) is used to study the effects of displacement constraint on the gyroscope. The analysis proves that even if the displacement constraint of direct contact with the weak connecting beam is not established, the equivalent stiffness of the gyroscope can be enhanced by limiting the displacement of the movable mass, thereby improving the shock resistance of the gyroscope. However, under the shock of high-g level, displacement constraint with insufficient spacing will cause multiple collisions of the small-stiffness oscillating frame and lead to an increase in stress. The cause of failure and shock resistance of a MEMS tuning fork gyroscope are verified by the shock test. By comparing the results, we can get a conclusion that is consistent with the theoretical analysis.
机译：位移限制（例如止动件）已广泛用于工程设计中，以提高微机电系统（MEMS）音叉陀螺仪的耐冲击性。然而，在实际应用中，已经发现在带挡块的MEMS音叉陀螺仪上会发生意外损坏。本文研究了两种位移约束对MEMS音叉陀螺仪故障模式的影响。将MEMS音叉陀螺仪简化为两自由度（2DOF）模型，然后使用有限元分析（FEA）研究位移约束对陀螺仪的影响。分析证明，即使不建立与弱连接梁直接接触的位移约束，也可以通过限制可动块的位移来提高陀螺仪的等效刚度，从而提高陀螺仪的抗冲击性。然而，在高克水平的冲击下，空间不足的位移约束会引起小刚度振动框架的多次碰撞，并导致应力增加。通过冲击测试验证了MEMS音叉陀螺仪的故障原因和抗冲击性。通过比较结果，我们可以得出与理论分析相一致的结论。

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