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Design and Experimental Research of a Rotary Micro-Actuator Based on a Shearing Piezoelectric Stack

机译：基于剪切压电堆的旋转微执行器的设计与实验研究

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摘要

The working principle of a rotating micro-actuator based on a piezoelectric stack was theoretically analyzed and experimentally verified. The actuator is compact in structure, and the key component is the shearing piezoelectric stack. The piezoelectric stack is used to drive the micro-rotor via an electromechanical transition, which produces high-speed rotation of the micro-rotor. We first established the dynamic model of the micro-actuator and numerically analyzed the motion of this model. The step displacement output was observed by simulation, and the step increment is quite large. For experimental verification, we fabricated the piezoelectric micro-actuator with a size of 12 mm × 10 mm × 8 mm and mass of 4.12 g and conducted a series of experiments. The results show qualitative agreement with the theoretical results; the maximum output speed of the micro-actuator is 5.86 × 105 μrad/s, and the motion resolution is 0.64 μrad, which is greater than that of most traditional piezoelectric actuators. The proposed micro-actuator offers superior performance in driving of selected small objects, such as in micro-ano-processing and cell operation.
机译：从理论上分析和实验验证了基于压电堆的旋转微执行器的工作原理。该致动器结构紧凑，关键部件是剪切压电叠层。压电叠层用于通过机电转换来驱动微转子，该机电转换使微转子高速旋转。我们首先建立了微执行器的动力学模型，并对该模型的运动进行了数值分析。通过仿真观察到步进位移输出，并且步进增量很大。为了进行实验验证，我们制造了尺寸为12 mm×10 mm×8 mm，质量为4.12 g的压电微致动器，并进行了一系列实验。结果与理论结果吻合。微执行器的最大输出速度为5.86×10 <数学xmlns：mml =“ http://www.w3.org/1998/Math/MathML” id =“ mm1”溢出=“ scroll”> 5 μ rad / s，运动分辨率为0.64 μ rad，比大多数传统的压电致动器大。所提出的微致动器在驱动选定的小物体方面提供了卓越的性能，例如在微/纳米处理和电池操作中。

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