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首页> 美国卫生研究院文献>Microsystems Nanoengineering >Chopper-modulated gas chromatography electroantennography enabled using high-temperature MEMS flow control device
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Chopper-modulated gas chromatography electroantennography enabled using high-temperature MEMS flow control device

机译：使用高温MEMS流量控制装置实现斩波调制的气相色谱电肛门造影

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We report the design, fabrication and characterization of a microelectromechanical systems (MEMS) flow control device for gas chromatography (GC) with the capability of sustaining high-temperature environments. We further demonstrate the use of this new device in a novel MEMS chopper-modulated gas chromatography-electroantennography (MEMS-GC-EAG) system to identify specific volatile organic compounds (VOCs) at extremely low concentrations. The device integrates four pneumatically actuated microvalves constructed via thermocompression bonding of the polyimide membrane between two glass substrates with microstructures. The overall size of the device is 32 mm×32 mm, and it is packaged in a 50 mm×50 mm aluminum housing that provides access to the fluidic connections and allows thermal control. The characterization reveals that each microvalve in the flow control chip provides an ON to OFF ratio as high as 1000:1. The device can operate reliably for more than 1 million switching cycles at a working temperature of 300 °C. Using the MEMS-GC-EAG system, we demonstrate the successful detection of cis-11-hexadecenal with a concentration as low as 1 pg at a demodulation frequency of 2 Hz by using an antenna harvested from the male Helicoverpa Virescens moth. In addition, 1 μg of a green leafy volatile (GLV) is barely detected using the conventional GC-EAG, while MEMS-GC-EAG can readily detect the same amount of GLV, with an improvement in the signal-to-noise ratio (SNR) of ~22 times. We expect that the flow control device presented in this report will allow researchers to explore new applications and make new discoveries in entomology and other fields that require high-temperature flow control at the microscale.
机译：我们报告的设计，制备和表征的微机电系统（MEMS）的气相色谱仪（GC）的流量控制设备具有维持高温环境的能力。我们进一步证明了该新设备在新型MEMS斩波调制的气相色谱-电子肛门造影（MEMS-GC-EAG）系统中的使用，以鉴定浓度极低的特定挥发性有机化合物（VOC）。该装置集成了四个气动微型阀，这些微型阀是通过聚酰亚胺膜在两个具有微结构的玻璃基板之间进行热压粘合而构建的。该设备的整体尺寸为32 mm×32 mm，并包装在50 mm×50 mm的铝制外壳中，该外壳可用于流体连接并允许进行热控制。该特征表明，流量控制芯片中的每个微型阀均提供高达1000：1的开/关比。该器件在300 C的工作温度下可以可靠地运行超过一百万个开关周期。使用MEMS-GC-EAG系统，我们演示了通过使用从雄性Helicoverpa Virescens蛾收获的天线，以2 Hz的解调频率成功检测到浓度低至1 pg的顺式11-十六碳烯。此外，使用传统的GC-EAG几乎无法检测到1μg的绿叶挥发物（GLV），而MEMS-GC-EAG可以很容易地检测到相同量的GLV，信噪比得到了改善（ SNR）〜22倍。我们希望本报告中介绍的流量控制装置将使研究人员能够探索新的应用，并在昆虫学和其他需要进行微米级高温流量控制的领域中取得新发现。

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