Electron collisions with atoms ions molecules and surfaces: Fundamental science empowering advances in technology

机译：电子与原子离子分子和表面的碰撞：推动科学技术进步的基础科学

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Electron collisions with atoms, ions, molecules, and surfaces are critically important to the understanding and modeling of low-temperature plasmas (LTPs), and so in the development of technologies based on LTPs. Recent progress in obtaining experimental benchmark data and the development of highly sophisticated computational methods is highlighted. With the cesium-based diode-pumped alkali laser and remote plasma etching of Si3N4 as examples, we demonstrate how accurate and comprehensive datasets for electron collisions enable complex modeling of plasma-using technologies that empower our high-technology–based society.

机译：电子与原子，离子，分子和表面的碰撞对于低温等离子体（LTP）的理解和建模至关重要，因此在基于LTP的技术开发中也是如此。重点介绍了在获得实验基准数据和开发高度复杂的计算方法方面的最新进展。以铯基二极管泵浦碱金属激光器和Si3N4的远程等离子蚀刻为例，我们演示了准确而全面的电子碰撞数据集如何实现对等离子技术的复杂建模，这些技术使我们的高科技社会得以发展。

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期刊名称 Proceedings of the National Academy of Sciences of the United States of America
作者
Klaus Bartschat; Mark J. Kushner;
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作者单位

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年(卷),期 2016(113),26
年度 2016
页码 7026–7034
总页数 9
原文格式 PDF
正文语种
中图分类
关键词
electron scattering close coupling ab initio plasmas kinetic modeling;

机译：电子散射;紧密耦合;从头算;等离子体;动力学建模;

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专利

1. Probing the dynamics of collision induced processes in atoms, molecules and solid surfaces with impact of keV electrons [J] . R. Shanker Indian Journal of Physics . 2011,第12期

机译：在keV电子的影响下探测原子，分子和固体表面中碰撞诱导过程的动力学
2. Advances and challenges in electron-molecule scattering physics - A report of the 14th International Symposium on Electron-Molecule Collisions and Swarms [J] . Khakoo MA, Lima MAP, Tennyson J Physica Scripta: An International Journal for Experimental and Theoretical Physics . 2006,第1期

机译：电子-分子散射物理学的进步与挑战-第14届电子-分子碰撞与碰撞国际研讨会报告
3. Two Components of the Total Ionization Cross Sections of Atoms and Molecules by Electron Impact: Resonant Excitation and Decay of the Fermi Electron-Hole System and the Dipole Electron Transition from a Bound to a Free State at a Binary Collision [J] . D. I. Vaisburd, K. E. Evdokimov Russian physics journal . 2003,第11期

机译：通过电子碰撞，原子和分子的总电离截面的两个组成部分：费米电子-孔系统的共振激发和衰减以及二元碰撞中偶极电子从束缚态到自由态的跃迁
4. Multiply excited molecules in electron collisions as probed by energy and angle-resolved coincidence measurements between a scattered electron and a photon from a fragment atom [C] . Takeshi Odagiri, Noriyuki Kouchi International Symposium on Polarization and Correlation in Electronic and Atomic Collisions . 2010

机译：通过来自散射电子和来自片段原子的光子之间的能量和角度分辨的重合测量探测的电子碰撞中的乘法激发分子
5. THEORETICAL STUDIES OF MOLECULAR COLLISION PROCESSES: (I) TWO-POTENTIAL APPROACH FOR ELECTRON-MOLECULE SCATTERING, (II) THREE-DIMENSIONAL QUANTUM-MECHANICAL STUDY ON ATOM-MOLECULE REACTIVE COLLISION WITH ROTATIONALLY PRE-EXCITED TARGET MOLECULE. [D] . SUN, JAMES CHENG. 1980

机译：分子碰撞过程的理论研究：（I）电子-分子散射的两种可能方法，（II）具有旋转预激目标分子的原子-分子反应性碰撞的三维量子力学研究。
6. Electron interactions with the heteronuclear carbonyl precursor H2FeRu3(CO)13 and comparison with HFeCo3(CO)12: from fundamental gas phase and surface science studies to focused electron beam induced deposition [O] . Ragesh Kumar T P, Paul Weirich, Lukas Hrachowina, 2018

机译：电子与杂核羰基前体H2FeRu3（CO）13的相互作用以及与HFeCo3（CO）12的比较：从基础气相和表面科学研究到聚焦电子束诱导沉积
7. The interaction of atoms and molecules with solid surfaces - X-The activation of adsorbed atoms by metallic electrons [O] . 1937

机译：原子和分子与固体表面的相互作用 - X-金属电子激活吸附原子的活化
8. Ion-Molecule Collisions, Electron Molecule Collisions, Excitation and Ionizationof Atoms [R] . Bell, K. L., Reid, R. H. 1994

机译：离子 - 分子碰撞，电子分子碰撞，原子的激发和电离

Electron collisions with atoms ions molecules and surfaces: Fundamental science empowering advances in technology

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