This study presents an electromagnetically-actuated reciprocating pump for high-flow-rate microfluidic applications. The pump comprises four major components, namely a lower glass plate containing a copper microcoil, a middle PMMA plate incorporating a PDMS diaphragm with a surface-mounted magnet, upper PMMA channel plates, and a ball-type check valve located at the channel inlet. When an AC current is passed through the microcoil, an alternating electromagnetic force is established between the coil and the magnet. The resulting bi-directional deflection of the PDMS diaphragm causes the check-valve to open and close; thereby creating a pumping effect. The experimental results show that a coil input current of 0.4 A generates an electromagnetic force of 47 mN and a diaphragm deflection of 108 μm. Given an actuating voltage of 3 V and a driving frequency of 15 Hz, the flow rate is found to be 13.2 mL/min under zero head pressure conditions.
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机译：这项研究提出了一种用于高流量微流体应用的电磁致动往复泵。该泵包括四个主要组件，分别是装有铜微线圈的下部玻璃板，装有带有表面安装磁体的PDMS隔膜的中间PMMA板，上部PMMA通道板以及位于通道入口的球形止回阀。当交流电流通过微线圈时，线圈和磁体之间会产生交变的电磁力。 PDMS膜片产生的双向偏转导致止回阀打开和关闭。从而产生泵送效果。实验结果表明，0.4 A的线圈输入电流产生47 mN的电磁力和108μm的膜片挠度。给定3 V的启动电压和15 Hz的驱动频率，在零头压条件下，流速为13.2 mL / min。
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