• 主题
高级搜索  >
历史搜索 清空历史
首页> 美国卫生研究院文献>Sensors (Basel Switzerland) >Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors
【2h】

Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors

机译：基于Sezawa波模的表面声波传感器的质量载荷敏感性研究

代理获取
本网站仅为用户提供外文OA文献查询和代理获取服务，本网站没有原文。下单后我们将采用程序或人工为您竭诚获取高质量的原文，但由于OA文献来源多样且变更频繁，仍可能出现获取不到、文献不完整或与标题不符等情况，如果获取不到我们将提供退款服务。请知悉。
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In this work mass loading sensitivity of a Sezawa wave mode based surface acoustic wave (SAW) device is investigated through finite element method (FEM) simulation and the prospects of these devices to function as highly sensitive SAW sensors is reported. A ZnO/Si layered SAW resonator is considered for the simulation study. Initially the occurrence of Sezawa wave mode and displacement amplitude of the Rayleigh and Sezawa wave mode is studied for lower ZnO film thickness. Further, a thin film made of an arbitrary material is coated over the ZnO surface and the resonance frequency shift caused by mass loading of the film is estimated. It was observed that Sezawa wave mode shows significant sensitivity to change in mass loading and has higher sensitivity (eight times higher) than Rayleigh wave mode for the same device configuration. Further, the mass loading sensitivity was observed to be greater for a low ZnO film thickness to wavelength ratio. Accordingly, highly sensitive SAW sensors can be developed by coating a sensing medium over a layered SAW device and operating at Sezawa mode resonance frequency. The sensitivity can be increased by tuning the ZnO film thickness to wavelength ratio.
机译：在这项工作中，通过有限元方法（FEM）仿真研究了基于Sezawa波模式的表面声波（SAW）设备的质量负载敏感性，并报道了这些设备用作高灵敏度SAW传感器的前景。 ZnO / Si层状SAW谐振器被考虑用于仿真研究。最初，对于较低的ZnO膜厚，研究了Sezawa波模的出现以及Rayleigh和Sezawa波模的位移幅度。此外，在ZnO表面上覆盖由任意材料制成的薄膜，并估计由膜的质量负载引起的共振频率偏移。观察到，对于相同的器件配置，Sezawa波模式对质量负载的变化显示出显着的灵敏度，并且比Rayleigh波模式具有更高的灵敏度（高八倍）。此外，对于低的ZnO膜厚度与波长之比，观察到质量加载灵敏度更高。因此，可以通过将感测介质涂覆在分层的SAW器件上并以Sezawa模式谐振频率工作来开发高灵敏度的SAW传感器。可以通过调整ZnO膜的厚度与波长之比来提高灵敏度。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
代理获取

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号