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A Harsh Environment Wireless Pressure Sensing Solution Utilizing High Temperature Electronics

机译：利用高温电子的恶劣环境无线压力传感解决方案

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Pressure measurement under harsh environments, especially at high temperatures, is of great interest to many industries. The applicability of current pressure sensing technologies in extreme environments is limited by the embedded electronics which cannot survive beyond 300 °C ambient temperature as of today. In this paper, a pressure signal processing and wireless transmission module based on the cutting-edge Silicon Carbide (SiC) devices is designed and developed, for a commercial piezoresistive MEMS pressure sensor from Kulite Semiconductor Products, Inc. Equipped with this advanced high-temperature SiC electronics, not only the sensor head, but the entire pressure sensor suite is capable of operating at 450 °C. The addition of wireless functionality also makes the pressure sensor more flexible in harsh environments by eliminating the costly and fragile cable connections. The proposed approach was verified through prototype fabrication and high temperature bench testing from room temperature up to 450 °C. This novel high-temperature pressure sensing technology can be applied in real-time health monitoring of many systems involving harsh environments, such as military and commercial turbine engines.
机译：在苛刻的环境下，尤其是在高温下的压力测量，是许多行业非常感兴趣的。当前的压力传感技术在极端环境中的应用受到嵌入式电子设备的限制，嵌入式电子设备无法承受超过300°C的环境温度。本文针对Kulite Semiconductor Products，Inc.的商用压阻MEMS压力传感器，设计和开发了基于尖端碳化硅（SiC）器件的压力信号处理和无线传输模块。配备了这种先进的高温SiC电子器件，不仅是传感器头，而且整个压力传感器套件都能够在450°C的温度下运行。无线功能的增加还消除了昂贵且脆弱的电缆连接，使压力传感器在恶劣的环境中更加灵活。通过原型制造和从室温到450°C的高温工作台测试，验证了该方法的有效性。这种新颖的高温压力感测技术可以应用于许多涉及恶劣环境的系统的实时健康监控，例如军用和商用涡轮发动机。

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