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首页> 美国卫生研究院文献>Sensors (Basel Switzerland) >Physical Characterization and Effect of Effective Surface Area on the Sensing Properties of Tin Dioxide Thin Solid Films in a Propane Atmosphere
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Physical Characterization and Effect of Effective Surface Area on the Sensing Properties of Tin Dioxide Thin Solid Films in a Propane Atmosphere

机译：丙烷大气中二氧化锡固体薄膜的物理表征及有效表面积对传感性能的影响

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摘要

The physical properties and the effect of effective surface area (ESA) on the sensing properties of tin dioxide [SnO2] thin films in air and propane [C3H8] atmosphere as a function of operating temperature and gas concentration have been studied in this paper. SnO2 thin films with different estimated thicknesses (50, 100 and 200 nm) were deposited on glass substrates by the chemical spray technique. Besides, they were prepared at two different deposition temperatures (400 and 475 °C). Tin chloride [SnCl4 · 5H2O] with 0.2 M concentration value and ethanol [C2H6O] were used as tin precursor and solvent, respectively. The morphological, and structural properties of the as-prepared films were analyzed by AFM and XRD, respectively. Gas sensing characteristics of SnO2 thin solid films were measured at operating temperatures of 22, 100, 200, and 300 °C, and at propane concentration levels (0, 5, 50, 100, 200, 300, 400, and 500 ppm). ESA values were calculated for each sample. It was found that the ESA increased with the increasing thickness of the films. The results demonstrated the importance of the achieving of a large effective surface area for improving gas sensing performance. SnO2 thin films deposited by spray chemical were chosen to study the ESA effect on gas sensing properties because their very rough surfaces were appropriate for this application.
机译：本文研究了物理性质和有效表面积（ESA）对空气和丙烷[C3H8]气氛中二氧化锡[SnO2]薄膜的感测性能随操作温度和气体浓度的影响。通过化学喷涂技术，将具有不同估计厚度（50、100和200 nm）的SnO2薄膜沉积在玻璃基板上。此外，它们是在两种不同的沉积温度（400和475°C）下制备的。锡的前体和溶剂分别使用浓度为0.2 M的氯化锡[SnCl4·5H2O]和乙醇[C2H6O]。通过AFM和XRD分别分析了所制备膜的形态和结构性能。在22、100、200和300°C的工作温度下以及丙烷浓度水平（0、5、50、100、200、300、400和500 ppm）下测量SnO2固体薄膜的气敏特性。计算每个样品的ESA值。发现ESA随着膜厚度的增加而增加。结果证明了实现大的有效表面积对于改善气体传感性能的重要性。选择通过喷雾化学沉积的SnO2薄膜来研究ESA对气体传感性能的影响，因为它们非常粗糙的表面适合该应用。

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