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Gas Sensing Properties of In2O3 Nano-Films Obtained by Low Temperature Pulsed Electron Deposition Technique on Alumina Substrates

机译：氧化铝衬底上低温脉冲电子沉积技术获得的In2O3纳米薄膜的气敏特性

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摘要

Nanostructured Indium(III) oxide (In2O3) films deposited by low temperature pulsed electron deposition (LPED) technique on customized alumina printed circuit boards have been manufactured and characterized as gas sensing devices. Their electrical properties have monitored directly during deposition to optimize their sensing performance. Experimental results with oxidizing (NO2) as well as reducing (CO) gases in both air and inert gas carriers are discussed and modeled.

机译：通过低温脉冲电子沉积（LPED）技术在定制的氧化铝印刷电路板上沉积的纳米结构的三氧化二铟（In2O3）膜已被制造出来并表征为气体传感设备。它们的电性能已在沉积过程中直接监控，以优化其感测性能。讨论并模拟了空气和惰性气体载体中的氧化性（NO2）和还原性（CO）气体的实验结果。

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期刊名称 Sensors (Basel Switzerland)
作者
Tommaso Addabbo; Mara Bruzzi; Ada Fort; Marco Mugnaini; Valerio Vignoli;
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作者单位

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年(卷),期 2018(18),12
年度 2018
页码 4410
总页数 17
原文格式 PDF
正文语种
中图分类
关键词
metal oxide gas sensors nano-structured device pulsed electron deposition technique sensor modeling;

机译：金属氧化物气体传感器;纳米结构器件;脉冲电子沉积技术;传感器建模;

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专利

1. Role of substrate temperature on the structural, morphological and optical properties of CuGaSe_2 thin films grown by Pulsed Electron Deposition technique [J] . Matteo Bronzoni, Marco Stefancich, Stefano Rampino Thin Solid Films . 2012,第24期

机译：衬底温度对脉冲电子沉积技术生长的CuGaSe_2薄膜的结构，形态和光学性质的影响
2. Effect of growth temperature on the properties of GaN epitaxial films grown on magnesium aluminate scandium oxide substrates by pulsed laser deposition [J] . Wang Wenliang, Yan Tao, Yang Weijia, Materials Letters . 2016,第NOVa15期

机译：生长温度对通过脉冲激光沉积在铝酸镁scan氧化物衬底上生长的GaN外延膜性能的影响
3. Investigation of structure, optical, nonlinear optical, dielectrical properties and electronic results of La_(0.01)Ba_(0.99)TiO_3, Sm_(0.5)Sr_(0.5)CoO_3 and Sm_(0.5)Sr_(0.5)CoO_3/La_(0.01)Ba_(0.99)TiO_3 thin films grown on quartz substrates using pulsed laser deposition (PLD) technique [J] . Moez A. Abdel, Kim Y. S., Ali Ahmed I. Journal of Optics . 2021,第2期

机译：结构，光学，非线性光学，电介质特性和LA_（0.01）BA_（0.99）TiO_3，SM_（0.5）SR_（0.5）COO_3和SM_（0.5）SR_（0.01）BA_（0.01）BA_的电子结果（0.99）使用脉冲激光沉积（PLD）技术在石英基板上生长的TiO_3薄膜
4. Pulsed-bias Sputter Deposition of Chromia and Alumina Films at Low Substrate Temperature [C] . M. Audronis, A. Matthews, A. Leyland Society of Vacuum Coaters Annual Technical Conference . 2008

机译：基板温度低时铬和氧化铝膜的脉冲偏压溅射沉积
5. Matrix-Assisted Pulsed Laser Evaporation of Conjugated Polymer and Hybrid Nanocomposite Thin Films: A Novel Deposition Technique for Organic Optoelectronic Devices. [D] . Pate, Ryan. 2011

机译：共轭聚合物和杂化纳米复合薄膜的基质辅助脉冲激光蒸发：一种用于有机光电器件的新型沉积技术。
6. The effect of substrate temperature and oxygen partial pressure on the properties of nanocrystalline copper oxide thin films grown by pulsed laser deposition [O] . Syed Farid Uddin Farhad 2021

机译：衬底温度和氧分压对脉冲激光沉积生长纳米晶铜氧化物薄膜性能的影响
7. Gas Sensing Properties of In2O3 Nano-Films Obtained by Low Temperature Pulsed Electron Deposition Technique on Alumina Substrates [O] . Tommaso Addabbo, Mara Bruzzi, Ada Fort, 2018

机译：低温脉冲电子沉积技术在氧化铝基材上获得的In2O3纳米膜的气体传感性能
8. Low Temperature Pulsed Plasma Deposition. Part 1. A New Technique for Thin Film Deposition with Complete Gas Dissociation [R] . Scarsbrook, G. A., Llewellyn, I. P., Ojha, S. M., 1988

机译：低温脉冲等离子体沉积。第1部分：完全气体解离薄膜沉积的新技术

Gas Sensing Properties of In2O3 Nano-Films Obtained by Low Temperature Pulsed Electron Deposition Technique on Alumina Substrates

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