The present work provides a detailed description on quantitative 3D magnetic field reconstruction using a scanning magnetoresistance microscopy setup incorporating a 19.5 μm × 2.5 μm magnetoresistive sensor. Therefore, making use of a rotation stage, 11 nm thick ferromagnetic CoFe elements with 20 μm × 5 μm planar size were measured along different sensor axes and converted into cartesian coordinate magnetic field components by use of the analytical coordinate transform equations. The reconstruction steps were followed and validated by numerical simulations based on a field averaging model caused by a non-negligible sensor volume. Detailed in-plane magnetic component reconstruction with ability to reconstruct sub-micrometer features is achieved. A discussion on the limiting factors for optimal resolution is presented.
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