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首页> 美国卫生研究院文献>Sensors (Basel Switzerland) >Electrical and Thermal Properties of Heater-Sensor Microsystems Patterned in TCO Films for Wide-Range Temperature Applications from 15 K to 350 K
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Electrical and Thermal Properties of Heater-Sensor Microsystems Patterned in TCO Films for Wide-Range Temperature Applications from 15 K to 350 K

机译：在15 K至350 K的宽范围温度应用中在TCO膜中构图的加热传感器微系统的电气和热性能

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摘要

This paper presents an analysis of the electrical and thermal properties of miniature transparent heaters for use in a wide range of temperature applications, from 15 K to 350 K. The heater structures were produced in transparent conducting oxide (TCO) layers: indium tin oxide (ITO) and ITO/Ag/ITO on polymer substrates-polyethylene naphthalate (PEN) and polyethylene terephthalate (PET), by direct laser patterning. Thermo-resistors for temperature measurement were created in the same process, with geometry corresponding to the shape of the heating path. The thermo-resistors integrated with the heating structure allowed easy control of the thermal state of the heaters. Laser patterning provided high precision and repeatability in terms of the geometry and electrical properties of the heater-sensor structures. Measurements at temperatures from 15 K to above room temperature (350 K) confirmed the excellent dynamics of the heating and cooling processes, due to current flow. The largest value for surface heating power was over 3 W/cm2. A heater-sensor structure equipped with a small capacity chamber was successfully applied for controlled heating of small volumes of different liquids. Such structures have potential for use in research and measurements, where for various reasons controlled and accurate heating of small volumes of liquids is required.
机译：本文介绍了在15 K至350 K的各种温度应用中使用的微型透明加热器的电学和热学性能。加热器结构在透明导电氧化物（TCO）层中生产：氧化铟锡（ ITO）和ITO / Ag / ITO通过直接激光图案化在聚萘二甲酸乙二醇酯（PEN）和聚对苯二甲酸乙二醇酯（PET）上形成。在同一过程中创建了用于温度测量的热敏电阻，其几何形状对应于加热路径的形状。与加热结构集成在一起的热敏电阻可轻松控制加热器的热状态。就加热器-传感器结构的几何形状和电特性而言，激光图案化提供了高精度和可重复性。在15 K到高于室温（350 K）的温度下进行的测量证实，由于电流的影响，加热和冷却过程具有出色的动力学性能。表面加热功率的最大值超过3 W / cm 2 。装有小容量室的加热器-传感器结构已成功应用于控制少量不同液体的加热。这样的结构具有用于研究和测量的潜力，由于各种原因，需要控制和精确加热少量液体。

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