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Scalable fabrication of a hybrid field-effect and acousto-electric device by direct growth of monolayer MoS2/LiNbO3

机译:通过单层MoS2 / LiNbO3的直接生长可扩展地制造混合的场效应和声电装置

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摘要

Lithium niobate is the archetypical ferroelectric material and the substrate of choice for numerous applications including surface acoustic wave radio frequencies devices and integrated optics. It offers a unique combination of substantial piezoelectric and birefringent properties, yet its lack of optical activity and semiconducting transport hamper application in optoelectronics. Here we fabricate and characterize a hybrid MoS2/LiNbO3 acousto-electric device via a scalable route that uses millimetre-scale direct chemical vapour deposition of MoS2 followed by lithographic definition of a field-effect transistor structure on top. The prototypical device exhibits electrical characteristics competitive with MoS2 devices on silicon. Surface acoustic waves excited on the substrate can manipulate and probe the electrical transport in the monolayer device in a contact-free manner. We realize both a sound-driven battery and an acoustic photodetector. Our findings open directions to non-invasive investigation of electrical properties of monolayer films.
机译:铌酸锂是典型的铁电材料,也是众多应用的首选衬底,包括表面声波射频设备和集成光学器件。它提供了基本的压电和双折射特性的独特组合,但缺乏光学活性和半导体传输阻碍了在光电子学中的应用。在这里,我们通过可扩展的路线制造和表征混合式MoS2 / LiNbO3声电器件,该路线使用毫米级的MoS2直接化学气相沉积,然后在顶部进行场效应晶体管结构的光刻定义。原型设备展示出与硅上的MoS2器件竞争的电气特性。在基板上激发的表面声波可以非接触方式操纵和探测单层设备中的电传输。我们同时实现了声音驱动的电池和声学光电探测器。我们的发现为单层膜电性能的非侵入性研究开辟了方向。

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