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A Low-cost Highly-stable Surface Enhanced Raman Scattering Substrate by Si Nanowire Arrays Decorated with Au Nanoparticles and Au Backplate

机译:低成本高稳定度的表面增强拉曼散射基板该基板由装饰有金纳米粒子和金背板的硅纳米线阵列构成

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摘要

We present a facile and cost-effective manner to fabricate a highly sensitive and stable surface enhanced Raman scattering (SERS) substrate. First, a silicon nanowire array (SiNWA) is tailored by metal-assisted chemical etching (MaCE) method as a scaffold of the desired SERS substrate. Next, with an oblique angle deposition (OAD) method, optimized gold nanoparticles (AuNPs) are successfully decorated on the surface of the SiNWA. These AuNPs enable a strong localized electric field, providing abundant hot spots to intensify the Raman signals from the targeting molecules. By applying a well-established methodology, Taguchi method, which is invented for designing experiments, the optimized combination of parameters is obtained efficiently. The experimental results are also confirmed by finite-difference time-domain (FDTD) simulation calculations. Besides, a gold metal backplate (AuMBP) is applied to further enhancing the Raman signal intensity. Based on this developed SERS substrate, we demonstrated an enhancement factor (EF) of 1.78 × 106 and a coefficient of variation (CV) of 4.2%. Both EF and CV indicate a highly stable property and the optimized SERS substrate substantially outperform the commercial product. In the end, we also demonstrate a quantitative measurement on practical application of detecting malachite green (MG) with concentration from 10 nM to 100 μM.
机译:我们提出了一种简便且经济高效的方式来制造高度敏感和稳定的表面增强拉曼散射(SERS)衬底。首先,通过金属辅助化学蚀刻(MaCE)方法定制硅纳米线阵列(SiNWA)作为所需SERS基板的支架。接下来,采用倾斜角沉积(OAD)方法,将优化的金纳米颗粒(AuNPs)成功地装饰在SiNWA的表面上。这些AuNPs可以提供强大的局部电场,提供丰富的热点以增强来自靶向分子的拉曼信号。通过应用为设计实验而发明的公认的Taguchi方法,可以有效地获得参数的优化组合。通过有限差分时域(FDTD)模拟计算也证实了实验结果。此外,还应用了金金属背板(AuMBP)来进一步增强拉曼信号强度。基于这种开发的SERS底物,我们证明了1.78 1.×10 6 的增强因子(EF)和4.2%的变异系数(CV)。 EF和CV均显示出高度稳定的性能,并且经过优化的SERS底物大大优于商品。最后,我们还演示了定量检测孔雀绿(MG)浓度为10 withnM至100μM的实际应用的方法。

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