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Fabrication and characterization of GaN-based light-emitting diodes without pre-activation of p-type GaN

机译:无需预激活p型GaN的GaN基发光二极管的制造和表征

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摘要

We fabricated GaN-based light-emitting diodes (LEDs) without pre-activation of p-type GaN. During the fabrication process, a 100-nm-thick indium tin oxide film was served as the p-type contact layer and annealed at 500°C in N2 ambient for 20 min to increase its transparency as well as to activate the p-type GaN. The electrical measurements showed that the LEDs were featured by a lower forward voltage and higher wall-plug efficiency in comparison with LEDs using pre-activation of p-type GaN. We discussed the mechanism of activation of p-type GaN at 500°C in N2 ambient. Furthermore, x-ray photoemission spectroscopy examinations were carried out to study the improved electrical performances of the LEDs without pre-activation of p-type GaN.
机译:我们在没有预激活p型GaN的情况下制造了基于GaN的发光二极管(LED)。在制造过程中,将100 nm厚的铟锡氧化物膜用作p型接触层,并在N2环境中于500°C退火20分钟,以增加其透明度并激活p型GaN 。电气测量表明,与使用p型GaN预激活的LED相比,LED具有较低的正向电压和较高的壁插效率。我们讨论了在N2环境中在500°C下激活p型GaN的机理。此外,还进行了X射线光电子能谱检查,以研究未预激活p型GaN的LED的改进电性能。

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